US Patent 7410265 Focusing-device for the radiation from a light source

Patent 7410265 was granted and assigned to Carl Zeiss SMT on August, 2008 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Carl Zeiss SMT

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

74102650

Patent Inventor Names

Wolfgang Singer0

Frank Melzer0

Martin Antoni0

Wilhelm Egle0

Andreas Seifert0

Bernhard Gellrich0

Bernhard Geuppert0

Date of Patent

August 12, 2008

Patent Application Number

106754710

Date Filed

September 30, 2003

Patent Primary Examiner

‌

Euncha P Cherry

Patent abstract

A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.

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