Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 12, 2008
Patent Application Number
11713580
Date Filed
March 1, 2007
Patent Primary Examiner
Patent abstract
By resolving objections in the prior art, provided are a novel copolymer suitable as a coating polymers which is excellent in adhesion to a substrate and can be used suitably as the polymer for the coating film having durability against pattern collapse in the finer pattern formation for progressed lithography technology and a method for producing the copolymer, as well as a novel thiol compound useful as a chain transfer agent in the production of the copolymer. The novel thiol compound of the present invention has the structure represented by the formula (1);
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.