Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 12, 2008
Patent Application Number
10711310
Date Filed
September 9, 2004
Patent Primary Examiner
Patent abstract
A method of managing wafer defects includes inspecting each chip in a wafer to generate a unit of wafer defect raw data, using a server to integrate the unit of wafer defect raw data to generate a unit of wafer defect distribution data for recording positions, types, and sizes of defects, using the server to generate a corresponding drawing file according to the unit wafer defect distribution data to show all kinds of defect distributions, and transmitting the drawing file to a terminal such that terminal users can view the defect distributions without receiving the unit of wafer defect raw data.
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