Patent attributes
A micro-electro-mechanical system (MEMS) slotline switch includes a slotline transmission line structure defined on top of substrate, a doubly-anchored conductive beam disposed perpendicular to, and above slotline so that there is a certain spacing between the beam and the slotline, a second conductive contact attached to the beam directly above the slot of the slotline a bottom conductive contacts defined on bottom surface of substrate and forming parallel-plate capacitor with conductive beam, conductive traces defined on the bottom surface of the substrate forming a microstrip-to-slotline transition for coupling signals in microstrip line to the slotline, and beam and bottom conductive contacts being spaced apart, and the beam being continuously movable when a voltage is applied between the beam and the bottom conductive contacts.
