Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Everhardus Cornelis Mos0
Roy Werkman0
Date of Patent
August 19, 2008
Patent Application Number
11396912
Date Filed
April 4, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
Correcting for misalignment of a substrate before it is exposed is performed using offset corrections and process corrections that are calculated based on alignment offset measurements of alignment marks and overlay measurements of overlay targets on substrates in previous batches.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
