Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mark Schumacher0
Andrew Klosinski0
Date of Patent
August 26, 2008
0Patent Application Number
113120620
Date Filed
December 20, 2005
0Patent Primary Examiner
Patent abstract
A pressure sensor for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein. A deflectable diaphragm is positioned in the cavity and deflects in response to a pressure applied to the cavity. An electrode on the diaphragm forms a variable capacitor with the pressure sensor body. The capacitance varies in response to the applied pressure.
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