US Patent 7415985 Substrate cleaning and drying apparatus
Patent 7415985 was granted and assigned to Dainippon Screen Mfg Co on August, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 23, 2004
0
Date of Patent
August 26, 2008
0
Patent Application Number
10947712
0
Patent Inventor Names
Shuzo Nagami
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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