US Patent 7416634 Method and apparatus for processing nanoscopic structures
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Patent Inventor Names
Sveinn Olafsson0
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Patent abstract
The present invention relates to a method and apparatus for growing nanostructures in a controlled way, wherein the controlling comprises controlling the electron emitting tips used for the nanoscopic structure growth. Further, the present invention describes an integrated method and apparatus for growing a plurality of electron emitting tips and nanoscopic structures in the same growing process.
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US Patent 07416634 Method and apparatus for processing nanoscopic structures US Patent 7416634 Method and apparatus for processing nanoscopic structures
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Patent Number
07416634
Patent Number
7416634
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Official Website
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US Patent 07416634 Method and apparatus for processing nanoscopic structures
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Patent jurisdiction
Patent number
07416634
Date of patent
August 26, 2008
Patent application number
10508532
Date Filed
March 25, 2003
Patent primary examiner
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