Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
August 26, 2008
Patent Application Number
11211215
Date Filed
August 19, 2005
Patent Primary Examiner
Patent abstract
A slit coater including buffer members having elasticity and installed at both sides of a slit nozzle unit, compensating for a height difference between both sides, preventing breakdown due to excessive stress generated by the height, and reducing set-up time. The slit coater includes: a table on which an object to be processed is mounted; a slit nozzle unit formed above the table for applying coating solution onto the object; a driving unit moving the slit nozzle unit in a predetermined direction; and buffer members having elasticity installed at both sides of the slit nozzle unit.
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