Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Walter Steinberg0
Gerhard Schlueter0
Michael Ferber0
Date of Patent
August 26, 2008
Patent Application Number
11424500
Date Filed
June 15, 2006
Patent Primary Examiner
Patent abstract
A test mask 1 for microscopy is disclosed, which is formed on a substrate of quartz. The test mask 1 comprises a multiplicity of sub-masks 4, which are implemented such that each sub-mask 4 comprises structures which differ within a sub-mask 4 with regard to form and size. In addition, the structures of the individual sub-masks 4 are designed for optical or particle optical measurements according to size.
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