US Patent 7417743 Interferometry systems and methods
Patent 7417743 was granted and assigned to Zygo Corporation on August, 2008 by the United States Patent and Trademark Office.
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In general, in a first aspect, the invention features apparatus that include an interferometer having a main cavity and an auxiliary reference surface, the main cavity including a primary reference surface and a test surface. The interferometer is configured to direct a primary portion of input electromagnetic radiation to the main cavity and an auxiliary portion of the input electromagnetic radiation to reflect from the auxiliary reference surface, wherein a first portion of the primary portion in the main cavity reflects from the primary reference surface and a second portion of the primary portion in the main cavity reflects from the test surface. The interferometer is further configured to direct the electromagnetic radiation reflected from the test surface, the primary reference surface, and the auxiliary reference to a multi-element detector to interfere with one another to form an interference pattern.
US Patent 07417743 Interferometry systems and methods US Patent 7417743 Interferometry systems and methods
US Patent 07417743 Interferometry systems and methods
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