Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 2, 2008
Patent Application Number
11243483
Date Filed
October 5, 2005
Patent Primary Examiner
Patent abstract
A developing treatment apparatus for performing a developing treatment for a substrate, includes a substrate holding member for holding the substrate; an outer peripheral plate surrounding an outer peripheral portion of the substrate to form a gap between the plate and the outer peripheral portion of the substrate; and gas blowout ports for forming a gas flow which flows on a rear face of the substrate from a central portion side of the substrate to the outer peripheral portion side of the substrate, and passes by a lower end portion side of the gap.
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