Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 2, 2008
Patent Application Number
11437375
Date Filed
May 19, 2006
Patent Primary Examiner
Patent abstract
A defective position of a sample to be tested is detected by irradiating the test sample and another test sample with electron beam while scanning the test samples, storing values of current generated in the test samples correspondingly to electron beam irradiation positions as current waveforms and comparing the current waveforms.
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