Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert J. Duff0
Larry F. Rhodes0
Lawrence Seger0
Lester H. McIntosh, III0
Brian L. Goodall0
Date of Patent
September 9, 2008
Patent Application Number
10783386
Date Filed
February 20, 2004
Patent Primary Examiner
Patent abstract
Oligomers of polycyclic olefin monomers, and optionally allylic or olefinic monomers, and a method of making such oligomers that includes reacting polycyclic olefin monomers in the presence of a Ni or Pd containing catalyst, or in the case of allylic monomers in the presence of a free radical initiator. The oligomers can be included in photoresist compositions as dissolution rate modifiers. The photoresist compositions can further include a polymeric binder resin, a photoacid generator, and solvents.
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