Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 9, 2008
Patent Application Number
11516050
Date Filed
September 6, 2006
Patent Primary Examiner
Patent abstract
In calibration of overlay performance of an immersion lithographic apparatus, two sets of overlay data are obtained from exposures carried out using, for example, normal and reversed meanders. The two data sets can then be used to eliminate effects due to substrate cooling.
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