US Patent 7423757 Modulated reflectance measurement system with multiple wavelengths
Patent 7423757 was granted and assigned to KLA-Tencor on September, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 25, 2006
Date of Patent
September 9, 2008
Patent Application Number
11492583
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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