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US Patent 7425224 High pressure chemical vapor trapping method

Patent 7425224 was granted and assigned to Tegal Corporation on September, 2008 by the United States Patent and Trademark Office.

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Current Assignee
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Tegal Corporation
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
74252240
Patent Inventor Names
Tue Nguyen0
Date of Patent
September 16, 2008
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Patent Application Number
113187100
Date Filed
December 27, 2005
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Patent Primary Examiner
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Robert A. Hopkins
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Patent abstract

A high pressure trapping system is provided to collect chemical vapor by-products in successive stages through chemical reasons conducted at progressively colder temperatures. A hot trap receives chemical vapor exhaust and collects a first waste, typically a solid, as a result of the high temperature completing a chemical reason in the vapor. Surviving gaseous by-products continue to the next process. The following chamber is colder, and collects waste as a solid or a liquid as a result of a chemical process dependent on the cold temperature. Sometimes a third chamber is used for even a colder chemical reaction to collect waste products. As a solid, these waste products are easier to collect, remove, and even reuse.

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