US Patent 7425726 Electroabsorption modulators and methods of making the same

Electro-absorption modulators and methods of making the same are described. In one aspect, an electroabsorption modulator includes first and second electrodes, first and second cladding regions, an active region, and a tunnel junction structure. The first and second cladding regions are between the first and second electrodes. The active region is between the first and second cladding regions and includes a light absorption region. The tunnel junction structure is between the active region and one of the first and second cladding regions.