US Patent 7426067 Atomic layer deposition on micro-mechanical devices
Patent 7426067 was granted and assigned to Regents of the University of Colorado on September, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 17, 2002
Date of Patent
September 16, 2008
Patent Application Number
10322195
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 7426067 Atomic layer deposition on micro-mechanical devices
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
