Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jun-Mo Jung0
Jung-Soo Lee0
Date of Patent
September 30, 2008
0Patent Application Number
113379710
Date Filed
January 23, 2006
0Patent Primary Examiner
Patent abstract
Disclosed herein is a substrate transferring apparatus. The apparatus comprises air injection modules, which serve to float a substrate, and can be independently attached to or detached from the substrate transferring apparatus. Thus, even if any one of the air injection modules is damaged, the substrate is prevented from falling because other air injection modules serve to continuously float the substrate. Furthermore, with such a construction, the air injection modules have an advantage in view of maintenance.
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