Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Saravanan Sadasivan0
Thirumani A. Selvan0
Date of Patent
October 7, 2008
0Patent Application Number
116336920
Date Filed
December 4, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A MEMS based pressure sensor for flow measurements includes a pressure sense die located between a media seal and a conductive seal. Such a system includes a pressure sense die located between a media seal and a conductive seal. A sensing diaphragm is generally associated with the pressure sense die, wherein the sensing diaphragm deflects when a pressure is applied thereto. An impedance circuit is generally embedded with one or more resistors on the sensing diaphragm to which the pressure to be detected is applied. An ASIC is generally associated with the impedance circuit and the sense die, wherein the ASIC is placed on a lead frame for signal conditioning in order to detect a change in the pressure.
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