Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tadahiro Yasuda0
William W. White0
Christopher Davis0
Daniel T. Mudd0
Kimura Miyoshi0
Virginia Miller0
Date of Patent
October 7, 2008
0Patent Application Number
110637450
Date Filed
February 24, 2005
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A flow restrictor with a first disk having at least one inlet and at least one outlet and a flow path and a second disk having no flow path. The first disk and the second disk being stacked together. A mass flow controller comprising with an input, an output, a flow path, a pressure transducer and the above flow restrictor.
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