Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Rick J. Roberts0
Timothy Weidman0
Dan Maydan0
David Quach0
Farhad Moghadam0
Jun Zhao0
Date of Patent
October 7, 2008
0Patent Application Number
102786150
Date Filed
October 22, 2002
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus for processing substrates is disclosed. In one embodiment, the apparatus includes a housing and a plurality of stacked cell structures in the housing. An actuator is adapted to move the plurality of stacked cell structures inside of the housing while substrates in the stacked cell structures are being heated.
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