Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 7, 2008
Patent Application Number
10924194
Date Filed
August 24, 2004
Patent Primary Examiner
Patent abstract
A variable attenuator is provided for selectively attenuating a radiation beam in a lithographic apparatus. The attenuator is generally planar and comprises two wedge shaped prisms formed of refractive material located adjacent to each other, arranged so that the radiation beam passes through both prisms. The attenuator is rotatable to vary the angle at which radiation strikes the prisms, thus varying the transmission at each surface.
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