US Patent 7434457 Fluid property sensors

Micro-Electro Mechanical Systems (MEMS) based fluid sensors adapted to measure physical properties of oilfield reservoir fluids under downhole conditions. Certain embodiments of the invention may be characterized as a MEMS based reservoir fluid sensor adapted for downhole conditions having a planar member machined from a substrate material, an electrical conductor formed at least partly on the planar member; and a gauge formed on the planar member and adapted to measure a physical effect on the planar member, the physical effect being indicative of a property of a fluid in contact with the planar member.