Patent 7434537 was granted and assigned to Schott AG on October, 2008 by the United States Patent and Trademark Office.
An apparatus for coating objects having a single microwave source, two or more coating chambers, and an impedance structure or a waveguide structure. The coating chambers are connected to the single microwave source. The impedance structure or waveguide structure divides the microwave energy in order to generate plasmas in the coating chambers.