US Patent 7436171 Apparatus for probing multiple integrated circuit devices

A probing apparatus comprises a platform with a rectangular opening, two vertical rails positioned at two sides of the rectangular opening, two vertical sliding modules each including a vertical sliding base positioned on the vertical rail, a bearing member and a pivot connecting the vertical sliding base and the bearing member, at least one non-circular lateral rail with two ends positioned on the bearing member of the vertical sliding module, at least one lateral sliding module each including a lateral sliding base positioned on the lateral rail and a hanger positioned on the lateral sliding base, and at least one tunable stage configured to hang on the non-circular lateral rail via the hanger of the lateral sliding module.