Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Stephen DeOrnellas0
Kurt Olson0
Leslie Jerde0
Date of Patent
October 21, 2008
0Patent Application Number
098883650
Date Filed
June 22, 2001
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A reactor for processing semiconductor wafers with electrodes and other surfaces that can be one of heated, textured and/or pre-coated in order to facilitate adherence of materials deposited thereon, and eliminate the disadvantages resulting from the spaulding, flaking and/or delaminating of such materials which can interfere with semiconductor wafer processing.
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