US Patent 7440155 Mass-balanced actuating mechanism for a micro scanning device

An actuating mechanism includes a scanner chip having a scan table mounting cavity, and a bracket moveably positioned in the scan table mounting cavity. A scan table is moveably positioned in the bracket. The bracket has a first mass and the scan table has a second mass. A first coil and frame collectively define a third mass and a second coil and frame collectively define a fourth mass. A first pivoting element is connected to the first coil and the scan table. The first pivoting element is pivotally supported about a first pivot point and connected though an asymmetrical leverage connection to the first coil and the scan table. A second pivoting element is connected to the second coil and the scan table. The second pivoting element is pivotally supported about a second pivot point and connected through a symmetric leverage connection to the second coil and the scan table.