Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Joeri Lof0
Date of Patent
October 28, 2008
0Patent Application Number
111295770
Date Filed
May 16, 2005
0Patent Primary Examiner
Patent abstract
An imprint lithography apparatus is disclosed which has a needle, and a substrate table arranged to hold a substrate to be imprinted, wherein the needle is moveable between a first position and a second position, the first position being such that in use the needle penetrates a layer of imprintable material on the substrate, and the second position being such that in use the needle is disengaged from the imprintable material on the substrate, the substrate table and the needle arranged such that one may be scanned relative to the other.
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