US Patent 7442615 Semiconductor processing system and method
Patent 7442615 was granted and assigned to Tegal Corporation on October, 2008 by the United States Patent and Trademark Office.
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Patent abstract
Systems and methods are disclosed to perform semiconductor processing with a process chamber; a flash lamp adapted to be repetitively triggered; and a controller coupled to the control input of the flash lamp to trigger the flash lamp. The system can deploy a solid state plasma source in parallel with the flash lamp in wafer processing.
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US Patent 07442615 Semiconductor processing system and method US Patent 7442615 Semiconductor processing system and method
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Patent Number
0744261500
Patent Number
744261500
Edits on 25 Apr, 2023
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074426150
Date of Patent
October 28, 2008
0Patent Application Number
114436200
Date Filed
May 31, 2006
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074426150
Date of Patent
October 28, 2008
0Patent Application Number
114436200
Date Filed
May 31, 2006
0Official Website
Patent Primary Examiner
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US Patent 07442615 Semiconductor processing system and method
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07442615
Date of patent
October 28, 2008
Patent application number
11443620
Date Filed
May 31, 2006
Patent primary examiner
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