Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Gokhan Percin0
Franz X. Zach0
Roy Prasad0
Ram S. Ramanujam0
Abdurrahman Sezginer0
Chi-Song Horng0
Date of Patent
October 28, 2008
0Patent Application Number
111395510
Date Filed
May 31, 2005
0Patent Primary Examiner
Patent abstract
A method for generating an OPC model is provided which takes into consideration across-wafer variations which occur during the process of manufacturing semiconductor chips. More particularly, a method for generating an OPC model is provided which takes into consideration across-wafer variations which occur during the process of manufacturing semiconductor chips based on the parameters of test patterns measured at the “wafer sweet spots” so as to arrive at an accurate model.
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