Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Andrew Norman Erickson0
Casey Patrick Hare0
Date of Patent
November 4, 2008
0Patent Application Number
112400900
Date Filed
September 29, 2005
0Patent Primary Examiner
Patent abstract
A method and apparatus for scanning multiple scanning probe microscopes in close proximity, to scan overlapping scan areas at the same time while avoiding collision employs a control system providing drive signals to a first Atomic Force Microscope (AFM) and calculated drive signals to additional AFMs based on the first drive signals and the relative position of the additional AFMs to the first AFM for consistent spaced motion. Scanning and Failure Analysis (FA) probing of multiple feature of interest using multiple APMs allows for reduced time for locating FA features to set up measurements.
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