US Patent 7446039 Integrated circuit system with dummy region
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Patent Inventor Names
Cing Gie Lim0
Dong Sheng Liu0
Feng Chen0
Subbiah Chettiar Mahadevan0
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Patent abstract
An integrated circuit system comprised by forming a first region, a second region and a third region within a dielectric over a substrate. The first region includes tungsten plugs. The second region is formed adjacent at least a portion of the perimeter of the first region and the third region is formed between the first region and the second region. An opening is formed in the third region and a material is deposited within the opening for preventing erosion of the first region.
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US Patent 07446039 Integrated circuit system with dummy region US Patent 7446039 Integrated circuit system with dummy region
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Patent Number
074460390
Patent Number
74460390
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Official Website
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Patent Jurisdiction
Patent Number
074460390
Date of Patent
November 4, 2008
0Patent Application Number
113071420
Date Filed
January 25, 2006
0Official Website
Patent Primary Examiner
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US Patent 07446039 Integrated circuit system with dummy region
Infobox
Is a
Patent jurisdiction
Patent number
07446039
Date of patent
November 4, 2008
Patent application number
11307142
Date Filed
January 25, 2006
Patent primary examiner
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