US Patent 7446548 Elastic micro probe and method of making same

An elastic micro probe includes an electrically conductive and stretchable spring, which has a first end, a second end opposite to the first end, and connection points disposed adjacent to the first end for connection to an external element, an electrically conductive probe body, which has a first end connected to the second end of the spring and a second end vertically upwardly protruding over the first end of the spring, and an electrically conductive tip, which has a bottom side connected to the second end of the probe body such that when the tip is pressed, the probe body is forced to move the second end of the spring, thereby causing the spring to be stretched and elastically deformed.