Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Torbjorn Sandstrom0
Date of Patent
November 4, 2008
0Patent Application Number
117453880
Date Filed
May 7, 2007
0Patent Primary Examiner
Patent abstract
An acousto-optic cell is used in a method and device for patterning a workpiece, for exposing a radiation sensitive layer on a workpiece such as a mask or a device substrate. The acousto-optic cell includes an array of transducers. The transducers may supply columns of ultrasound to the cell. They may produce a two dimensional modulation pattern within the cell. Electromagnetic radiation is modulated by the cell and related to a workpiece. The modulation of the cell may modulate the amplitude and/or phase of the electromagnetic radiation. In some embodiments, adjoining columns of ultrasound may be positioned so that portions of the electromagnetic radiation partially overlap and interfere, after they are modulated.
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