Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yu-Sin Yang0
Ji-Young Shin0
Ki-Suk Chung0
Tae-Sung Kim0
Byung-Sug Lee0
Chung-Sam Jun0
Date of Patent
November 4, 2008
0Patent Application Number
114210190
Date Filed
May 30, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of classifying defects of an object includes irradiating multi-wavelength light onto the object, splitting light reflected from the object into light beams, each of the light beams having different wavelengths, obtaining image information of the object based on each of the light beams, forming a characteristic matrix that represent the wavelengths and the image information, and analyzing the characteristic matrix to determine types of the defects on the object. Thus, the defects may be accurately classified using a difference between reactivity of each of the defects in accordance with variations of the wavelengths and inspection conditions.
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