Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tai-Kang Shing0
Heng-Chung Chang0
Hsieh-Shen Hsieh0
Huang-Kun Chen0
Chao-Jui Liang0
Cheng-Chang Lee0
Date of Patent
November 11, 2008
0Patent Application Number
116436610
Date Filed
December 22, 2006
0Patent Primary Examiner
Patent abstract
A semiconductor piezoresistive sensor, which is electrically connected with a circuit, includes a semiconductor base, at least one piezoresistive element and a conductive layer. The semiconductor base includes a diaphragm and a base. The base is disposed adjacent to and around the diaphragm. The piezoresistive element is formed in the diaphragm and is electrically connected with the circuit. The conductive layer is electrically connected with the diaphragm.
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