Patent attributes
A non-contact carrying device 10 holds and carries a carried object W in front of a carrying head 12 without making the carried object contact with the carrying head 12. A gas supplying surface 18 in which an opening portion of a gas supplying hole 19 is formed, an annular holding surface 21 projected rather than the gas supplying surface, and a gas guiding surface 22 smoothly connecting the gas supplying surface 18 with the holding surface 21 are formed in a tip surface of the carrying head 12. A nozzle 24 mounted on the carrying head 12 is provided with a base portion 24a mounted on the carrying head 12 and a disk portion 24b facing to the gas supplying surface 18 and forming an annular slit 25 for discharging gas between the gas supplying surface and the disk portion. Since the nozzle 24 is moved in an axial direction with respect to the carrying head 12 by a screw member 35, width of the slit 25 can be changed. An elastic force is applied to the nozzle 24 in a direction of enlarging the width of the slit 25 by a rubber material 37.
