US Patent 7453621 Micro mirrors with piezoelectric release mechanism
Patent 7453621 was granted and assigned to Spatial Photonics on November, 2008 by the United States Patent and Trademark Office.
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Patent Inventor Names
Vlad Novotny0
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Patent abstract
A spatial light modulator includes a substrate; a hinge in connection with the substrate; a mirror plate that is connected with the hinge and is configured to tilt about the hinge; and a piezoelectric device coupled with the substrate. The piezoelectric device is configured to produce an acoustic wave to assist the separation between the mirror plate and the object.
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US Patent 07453621 Micro mirrors with piezoelectric release mechanism US Patent 7453621 Micro mirrors with piezoelectric release mechanism
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Patent Number
074536210
Patent Number
74536210
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Current Assignee
Patent Jurisdiction
Patent Number
074536210
Date of Patent
November 18, 2008
0Patent Application Number
113669430
Date Filed
March 1, 2006
0Official Website
Patent Primary Examiner
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US Patent 07453621 Micro mirrors with piezoelectric release mechanism
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07453621
Date of patent
November 18, 2008
Patent application number
11366943
Date Filed
March 1, 2006
Patent primary examiner
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