Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shahyaan Desai0
Date of Patent
November 25, 2008
Patent Application Number
11166363
Date Filed
June 24, 2005
Patent Primary Examiner
Patent abstract
MEMS can be fabricated from fibers without the use of a matrix material. Devices can be built where fibers are attached only at a substrate edge (e.g. cantilevers, bridges). Motions can be controlled by adjusting the linkage between multiple fibers with weak coupling (e.g. base, tip, in-between). Driving mechanisms include base-forcing (magnetics, piezo, electrostatics) or tip forcing (magnetics). Mirrors may be formed on free ends of cantilevers to form optical scanners.
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