Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Peter van der Meulen0
Date of Patent
December 2, 2008
0Patent Application Number
109858340
Date Filed
November 10, 2004
0Patent Citations Received
0
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Patent Primary Examiner
Patent abstract
In a system having a number of semiconductor processing modules sharing a common vacuum environment, a mid-entry load lock is provided to permit insertion and removal of wafers into the vacuum environment at a point between various other robotic handlers, process modules, and load locks. This arrangement permits increased flexibility in scheduling when multiple wafers are processed concurrently.
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