US Patent 7459325 MEMS passivation with transition metals
Patent 7459325 was granted and assigned to Texas Instruments on December, 2008 by the United States Patent and Trademark Office.
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Patent abstract
Organic surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirrors. The binding of these surfactants to the surface is improved by first associating with the surface transition metal atoms or ions from Groups IVB, VB, and IVB of the periodic table.
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US Patent 07459325 MEMS passivation with transition metals US Patent 7459325 MEMS passivation with transition metals
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Patent Number
0745932500
Patent Number
745932500
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074593250
Date of Patent
December 2, 2008
0Patent Application Number
110299850
Date Filed
January 5, 2005
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074593250
Date of Patent
December 2, 2008
0Patent Application Number
110299850
Date Filed
January 5, 2005
0Official Website
Patent Primary Examiner
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US Patent 07459325 MEMS passivation with transition metals
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07459325
Date of patent
December 2, 2008
Patent application number
11029985
Date Filed
January 5, 2005
Patent primary examiner
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