Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Juan E. Dominguez0
Michael L. McSwiney0
Steven W. Johnston0
Date of Patent
December 2, 2008
Patent Application Number
11096345
Date Filed
March 31, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
A barrier and seed layer for a semiconductor damascene process is described. The seed layer is formed from a noble metal with an intermediate region between the barrier and noble metal layers to prevent oxidation of the barrier layer.
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