Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hayato Takahashi0
Nobuaki Kamiyama0
Date of Patent
December 9, 2008
0Patent Application Number
106914640
Date Filed
October 22, 2003
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A device manufacturing apparatus includes a discharge head discharging a droplet containing a functional material, a stage supporting a substrate on which the droplet is discharged, and which is capable of moving relative to the discharge head, a carrier carrying the substrate, a detector detecting a discharge condition of the droplet which is discharged from a discharge nozzle formed in the discharge head, and a controller executing a detection operation by the discharge device during a carrying operation of the substrate.
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