Patent attributes
An actuator includes a vibrating substrate having a first electrode on a surface thereof and configured to be reciprocally moved according to a minute displacement of a vibrator, a moving body arranged on the surface of a vibrating substrate and having a second electrode on a surface thereof which faces the first electrode with an insulating layer disposed therebetween, and a controller configured to move the moving body by applying voltage between the first and second electrodes to exert electrostatic adsorptive force therebetween and controlling frictional force between the vibrating substrate and the moving body. The actuator further includes an electric field reduction area configured to shield an electric field occurring between the first and second electrodes by the voltage applied therebetween in a portion which lies outside the first electrode on the surface of the vibrating substrate and faces the moving body.
