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Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoki Matsumoto0
Date of Patent
December 16, 2008
0Patent Application Number
116463970
Date Filed
December 28, 2006
0Patent Primary Examiner
Patent abstract
An ingot 3 of a hexagonal III-nitride crystal is cut using a wire array 21 composed of a wire 22. On this occasion, the ingot 3 is cut in such a manner that the ingot 3 is sliced with supply of an abrasive fluid while feeding at least one of the ingot 3 and wire 22 in a direction perpendicular to an extending direction B of the wire 22. During cutting the ingot 3, the extending direction B of the wire 22 is inclined at 3° or more to the {1-100} plane of the ingot 3.
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