US Patent 7465382 Precision flow control system

A precision flow controller is capable of providing a flow rate less than 100 microliters/minute and varying the flow rate in a prescribed manner that is both predictable and reproducible where the accuracy and precision of the flowrate is less than 5% of the flow rate. A plurality of variable pressure fluid supplies pump fluid through a single outlet. Flowmeters measure the flow rates and a controller compares the flow rates to desired flowrates and, if necessary, adjusts the plurality of variable pressure fluid supplies so that the variable pressure fluid supplies pump fluid at the desired flow rate. The variable pressure fluid supplies can be pneumatically driven.