US Patent 7465478 Plasma immersion ion implantation process
Patent 7465478 was granted and assigned to Applied Materials on December, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 28, 2005
Date of Patent
December 16, 2008
Patent Application Number
11046660
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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