US Patent 7465599 Method for manufacturing physical quantity sensor
Patent 7465599 was granted and assigned to Denso on December, 2008 by the United States Patent and Trademark Office.
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Patent abstract
A physical quantity sensor includes: a semiconductor substrate; a cavity disposed in the substrate and extending in a horizontal direction of the substrate; a groove disposed on the substrate and reaching the cavity; a movable portion separated by the cavity and the groove so that the movable portion is movably supported on the substrate; and an insulation layer disposed on a bottom of the movable portion so that the insulation layer provides a roof of the cavity.
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US Patent 07465599 Method for manufacturing physical quantity sensor US Patent 7465599 Method for manufacturing physical quantity sensor
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Patent Number
0746559900
Patent Number
746559900
Edits on 25 Apr, 2023
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074655990
Date of Patent
December 16, 2008
0Patent Application Number
118961710
Date Filed
August 30, 2007
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074655990
Date of Patent
December 16, 2008
0Patent Application Number
118961710
Date Filed
August 30, 2007
0Official Website
Patent Primary Examiner
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US Patent 07465599 Method for manufacturing physical quantity sensor
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07465599
Date of patent
December 16, 2008
Patent application number
11896171
Date Filed
August 30, 2007
Patent primary examiner
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